Reticle Changer & Stocker

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ARCS-200

  • Blank Box안에 적재된 반도체 Wafer용 Photo Mask를
    RSP-200 Pod와 결합하여 Packing.
  • Mask 방향 자동 검출, Align, Edge Image 촬영 및 저장.
    (Sensor & Vision 검출 System)
  • RFID & Barcode를 이용하여 108ea Slot 정보 관리.
  • POD & Mask Loading/Unloading. (Clean Robot 사용)
  • 문제 발생 시 단순 조작으로 자동 복귀.
  • Option : Pozzetta Box Open Unit. (EUV Mask)

SPECIFICATION

Dimension (mm)

※ ARCS-200   : 3800 (W) x 1750 (D) x 3050 (H)

※ ARCS-200P : 4346 (W) x 1750 (D) x 3050 (H)

Weight (kg)

※ ARCS-200   : Approximately 2400 kg

※ ARCS-200P : Approximately 2500 kg

Mask TypeOptic Blank Mask & EUV Blank Mask
Mask Packing Time10 ~ 15 min

Mask Front/Back Side
Judgment Method

- 1st judgment

   : 8ea Fiber Optic Detection

- 2nd judgment

   : Vision Detection

-

Equipment Condition

- RSP-200 Pod Loading Unit ; 5ea Pod Stock (RFID Reading)

- Mask Individual Information Save (Hand Barcode Reading)
- Mask Multi Box Loading Unit ; 5ea Mask Stock (Barcode Reading)
- Mask Transfer ATM Unit (Mask Flip 0° , 90° , 180° )
- Mask H-Lock Unit,  Fiber Optic Detection
- Mask Auto 'Pattern', 'Back' side judgment (Sensor)
- Mask Auto 'Pattern', 'Back' side judgment (Vision)
- Mask Auto Rotate Unit (0° , 90° , 180° , 270° ), Direction Vision Confirm
- Pod Open/Close Unit
- Pod Transfer Robot Unit
- PLC Control
- 2 PC Operation (HMI)
- CCTV Recorder (8ch, about 14 days save)
- Pod Stocker : 108ea Stock (RSP-200 Pod)
- ULPA Filter / Chemical Filter
- Fan Filter Unit
- Edit Recipe & Process Log Save
- GEM300 Communication Application
- Equipment Safety : SEMI S2, S8 Certification
- Pod Transfer Robot KCS Certification

Option- Temperature Conditioner (23ºC ±0.1ºC)  
Utility - Power : 1Phase AC200~220V, 50/60Hz, 30A
- CDA : ⅜” (0.5~0.7 Mpa) : 2ea Port
- Exhaust : Φ100 mm ( >300 Pa)