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SPO-150

  • Reticle Pod를 자동으로 열고 닫는 기능을 한다.
  • 적용 Pod : Single Pod.(RSP-150 / RSP-200)
         Multi Pod.(RSP-150)

SPECIFICATION

Dimension (mm)

297 (W) x 530 (D) x 772 (H)

Weight (kg)

Approximately 43 kg

Remarks

- Single Pod Open/Close

- Multi  Pod Open/Close

- Pod Stage Tilting

- Area Sensor Interlock

- Process Step Auto/Manual

Control System

- PLC & Touch Screen

Option

- Equipment Interface

Utility

- Power : 1Phase AC200~220V, 50/60Hz