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MPM-6000

It mounts the Pellicle precisely on the Photo Mask
automatically.
It can control Pellicle-Shift by adjusting the parts to
move the Photo Mask.
It loads and unloads the Pellicle and the Photo Mask
by manual.
It can mount the various pellicle on the Photo Mask
that the customer uses to.(5",6",7",9" and so on)
It mounts uniformly the Pellicle on the Photo Mask
and displays the mounting pressure on screen.

Dimension (mm)	- MPM-6000 : 770 (W) x 350 (D) x 560 (H) - MPM-6000M : 770 (W) x 450 (D) x 681 (H)
Weight (kg)	- MPM-6000 : Approximately 50 kg - MPM-6000M : Approximately 65 kg
Pellicle Shift	- 6025 Type : ≤200 ㎛ - 5"~9" Multi Type : ≤500 ㎛
Pellicle Rotation	- 6025 Type : ≤100 ㎛ - 5"~9" Multi Type : ≤150 ㎛
Mounting Pressure	1~30 kg
Mounting Time	1~9999 sec
Mounting Method	Control Mounting Pressure & Position & Speed
Equipment Condition	- Mask & Pellicle Manual Loading - Edit Recipe & Process Log Save - PLC Control - Touch Screen & Switch Operation (HMI) - 5",6",7" & 9" Photo Mask - Equipment Safety : CE or S2, S8 Certification
Option	- PC - Barcode Reading System
Utility	- Power : 1Phase AC200~220V, 50/60Hz - Exhaust : Φ60 mm ( >100 Pa)