SMIF

HOME > PRODUCT > Semiconductor > SMIF > MSO-6200

MSO-6200

  • It can flip and rotate the Photo Mask in the Reticle SMIF
    Pod to the direction for operator to set.
    (Rotation : 0°,90°,180°,270° / Flip : 0°,180°)
  • It's easy to maintenance by having the auto
    recovery system.

SPECIFICATION

Dimension (mm)

622 (W) x 571 (D) x 1090 (H)

Weight (kg)

Approximately 145 kg

Remarks

- Mask single Pod Open/Close

- Mask Rotate (0° , 90° , 180° , 270°)

- Mask Flip (0° , 180°)

- Auto Recovery

- Mask Protection Interface & Interlock

Control System

- PLC & Touch Screen (HMI)

Option

- ULPA Filter

- Ionizer System

Utility

- Power : 1Phase AC200~220V, 50/60Hz

- Exhaust : ¼”  ( >100 Pa)