Pellicle Mounter

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MPM-6000V

※ MPM-6000V / MPM-6000V-U


  • It mounts the Pellicle precisely on the Photo Mask
    automatically.
  • It gets the results to the minimum Pellicle-Shift
    by aligning the Photo Mask.
  • It loads and unloads the Pellicle and the Photo Mask
    by manual. (Using Only 6" Photo Mask)
  • It mounts uniformly the Pellicle on the Photo Mask and
    displays the mounting pressure on screen.

SPECIFICATION

Dimension (mm)

- MPM-6000V    : 770 (W) x 350 (D) x 560 (H)

- MPM-6000V-U : 830 (W) x 680 (D) x 1280 (H)

Weight (kg)

- MPM-6000V    : Approximately 50 kg

- MPM-6000V-U : Approximately 130 kg

Pellicle Shift

≤150 ㎛

Pellicle Rotation

≤80 ㎛

Mounting Pressure1~30 kg
Mounting Time1~9999 sec

Mounting Method

- Mask Auto Align

- Control Mounting Pressure & Position & Speed

Equipment Condition

- Auto-align function by a vision system

- Edit Recipe & Process Log Save

- PLC Control
- Touch Screen & Switch Operation (HMI)

- 6" Photo Mask
- Equipment Safety : CE or S2, S8 Certification

Option

- PC

- Barcode Reading System  

Utility - Power : 1Phase AC200~220V, 50/60Hz
- Exhaust : Φ60 mm ( >100 Pa)