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PME-200

  • it is function as load measurement when operated
    POD Open & Close and flatness measurement
    of POD Cover & Base Plate.
    ( Including Function as Mask Flip & Rotation )
  • It's easy to maintenance by having the auto
    recovery system.
  • Option
    -. Rotation : 0°,90°,180°,270° / Flip : 0°,180°

SPECIFICATION

Dimension (mm)670 (W) x 580 (D) x 1500 (H)
Weight (kg)Approximately 110 kg
POD Size200mm
Inspection Point

POD Flatness Inspection (10 point)

 -. POD Cover 6 Point (Flat Type)

 -. POD Base Plate 4 point (Ball Type)

POD Open/Close Torque Check

 -. Open/Close Direction Individual Measurement

     (Measurement Range : 19.61N/m)

Inspection MethodContact-Displacement Sensor
Inspection Resolution5mm ± 0.25mm (10µm)
Equipment Condition

- POD RFID Reading

- POD Loading & Cover Check

- POD Cover Lock/Unclock
- Edit Recipe & Process Log Save
- Mask Rotation (0° , 90° , 180° , 270°)
- Mask Flip (0° , 180°)

- PLC Control
- PC Operation (HMI)
- Load Port : 1 Port  

Option - FFU Unit
- Ionizer System
Utility - Power : 1Phase AC200~220V, 50/60Hz
- CDA : Φ6 Air Hose(4~5 Mpa)