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MSO-6000

  • It opens or closes the Reticle SMIF Pod by automatic.
  • It's able to tilt the Pod Stage to prevent from the
    Photo Mask's drop.
  • Using Pod : Single Pod. (RSP-150 / RSP-200)
    　　　　　　Multi Pod. (RSP-150)

SPECIFICATION

Dimension (mm)

390 (W) x 605 (D) x 593 (H)

Weight (kg)

Approximately 32 kg

Remarks

- Single Pod Open/Close

- Multi  Pod Open/Close

- Pod Stage Tilting

- Area Sensor Interlock

- Process Step Auto/Manual

Control System

- PLC & Touch Screen

Utility

- Power : 1Phase AC200~220V, 50/60Hz

        　     1Phase AC100~120V, 50/60Hz