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ASP Series

※ ASP-150 / ASP-200


  • It loads or unloads the Photo Mask in the Reticle SMIF
    Pod to the interfaced equipment by automatic.
  • It's easy to maintenance by having the auto
    recovery system.
  • Option : Rotation Unit / Flip Unit.

SPECIFICATION

Dimension (mm)

- 150 Model : 620 (W) x 530 (D) x 1320 (H)

- 200 Model : 714 (W) x 525 (D) x 1320 (H)

Weight (kg)

- 150 Model : Approximately 170 kg

- 200 Model : Approximately 231 kg

Remarks

- Mask single Pod Open/Close

- Mask Loading/Unloading

- Auto Recovery

- Mask Protection Interface & Interlock

- Equipment safety : CE or S2,S8 Certification

Control System

- PLC & Touch Screen (HMI)

Option

- Mask Rotate (0° , 90° , 180° , 270°)

- Mask Flip (0° , 180°)

- ULPA Filter

- Ionizer System

Utility

- Power : 1Phase AC200~220V, 50/60Hz

- Exhaust : ¼”  ( >100 Pa)